High Density Plasma Sources. Design, Physics and Performance

High Density Plasma Sources. Design, Physics and Performance By Oleg A. Popov (Eds.)
1995 | 453 Pages | ISBN: 0815513771 | PDF | 7 MB
Content: Preface, Pages vii-xii, Oleg A. PopovContributors, Pages xiii-xiv1 – Helicon Plasma Sources, Pages 1-75, Francis F. Chen2 – Planar Inductive Sources, Pages 76-99, John C. Forster, John H. Keller3 – Electrostatically-Shielded Inductively-Coupled RF Plasma Sources, Pages 100-148, Wayne L. Johnson4 – Very High Frequency Capacitive Plasma Sources, Pages 149-190, Michael J. Colgan, M. Meyyappan5 – Surface Wave Plasma Sources, Pages 191-250, Michel Moisan, Joëlle Margot, Zenon Zakrzewski6 – Microwave Plasma Disk Processing Machines, Pages 251-311, Jes Asmussen7 – Electron Cyclotron Resonance Plasma Sources, Pages 312-379, James E. Stevens8 – Distributed ECR Plasma Sources, Pages 380-425, Jacques PelletierIndex, Pages 426-445